Roch Mechatronics
Inc. Freezing
and Cooling equipment are backed
up by 20 years of strong hard
core exprience.
Application includes vacuum,
Nano technologies, Spectrophotometry.
The precision of thermoelectric
& Refrigerant type
• Digital Controler with
indicator/PID controls.
• Small Footprint
• Temperature control with
high accuracy
• PUF Insulation CFC Free.
• Leakage Detection Function,
touch Screen
• Leakage current monitoring
Chiller is
one of the most important equipment
of an etching & CVD equipment
to keep the temperature of wafer
& chamber stable at certain
level.
Especially,
Roch Mechatronics Inc. have
two type chiller,
compressor type chiller &
unlikely from conventional compressor
type chiller, operates by the
Thermoelectric module which
provides Solid State cooling.
This is the equipment with high
accuracy and high reliability.
